Application

All Applications

Semiconductor

Details
• Applications that can be used in semiconductor processes such as Etching, Deposition, and Optical Endpoint Detection
• Possible to provide optical emission spectrometer for real-time monitoring and control of semiconductor process


Features
• Real time measurement possible
• Flexible settings for endpoint detection, etc.
• High reliability for reliable performance in the process environment
• The wavelength of the emission line identifies the elements present in the plasma, and the emission line intensity is used to quantify particle and electron density in real time for process control.