Details

TS series are a diverse and configurable thin film measuring system. This is based on spectroscopic reflectance measurements to accurately determine the optical or non-optical thin film thickness. It is suitable for a variety of semiconductor, medical and industrial applications. TS series’s system measures anti-reflection coatings, scratch-resistant coatings, and rough layers on substrates such as steel, aluminum, brass, copper, ceramics and plastics. TS series’s Thin Film Reflectometry System allows you to analyze the thickness of the optical layer from 1 nm to 250 μm. A single thickness can be observed with a resolution of 0.1 nm and a single layer or multilayer film can be analyzed for less than 1 second.

Features

• Reliable - Resolution up to 0.1nm.
• Ability to analyze powerful - single or multilayer films.
• Portable - On-site measurement. Ideal for online thickness measurement.
• Sophisticated algorithms for measuring defects and roughness tolerances.